In recent years, the term microelectromechanical systems (MEMS) has become synonymous with the reference to such low-cost sensors, generally implying the use of a micro-machined silicon structure as the heart of the sensing element. More recently, however, advances in ceramic processing and production have spawned a new generation of low-cost, low-power piezoelectric accelerometers. These devices rival most MEMS sensors in price, while offering a new range of performance choices for many industrial vibration monitoring applications.
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