A new method of making MEMS devices is on the way. Traditional MEMS devices are made by etching silicon. A new method has been developed to etch metal, called EFAB. It is a metal deposition process that can be used to make complex 3D shapes. With EFAB processing, one can make electromagnetic actuators (e.g., solenoids) or sensors based on electromagnetic transduction—applications not well served by silicon micromachining.
Read the full article on the Sensor Mag web site.